Microring structure for flexible polymer waveguide-based optical pressure sensing
Publication Name
Optics Express
Abstract
Flexible pressure sensors provide a promising platform for artificial smart skins, and photonic devices provide a new technique to fabricate pressure sensors. Here, we present a flexible waveguide-based optical pressure sensor based on a microring structure. The waveguide-based optical pressure sensor is based on a five-cascade microring array structure with a size of 1500 µm × 500 µm and uses the change in output power to linearly characterize the change in pressure acting on the device. The results show that the device has a sensing range of 0–60 kPa with a sensitivity of 23.14 µW/kPa, as well as the ability to detect pulse signals, swallowing, hand gestures, etc. The waveguide-based pressure sensors offer the advantages of good output linearity, high integration density and easy-to-build arrays.
Open Access Status
This publication may be available as open access
Volume
31
Issue
20
First Page
33535
Last Page
33547
Funding Number
61177078
Funding Sponsor
National Natural Science Foundation of China