Interpretation of complex x-ray photoelectron peak shapes. I. Case study of Fe 2p3/2 spectra

Publication Name

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Abstract

Analyzing transition metal XPS peaks is widely used to determine surface composition and chemistry. However, these peaks have a complex structure, which is still the subject of investigation. Fe 2p analysis is a case in point where the multiplet structure and many-electron-effects lead to peak shapes that cannot be analyzed using standard approaches. Examination of the literature reveals that one of the most widely used approaches to data reduction when processing Fe 2p3/2 spectra involves using symmetric two- or three-component peak fitting with each peak effectively acting to capture a single chemical species (chemistry fit) in the complex spectra. Herein, this approach is compared to an envelope fit approach using Biesinger multiplet components of known iron oxides to determine how effective these methods are in reproducing iron oxide composition. Mixed oxide and metal XPS Fe 2p spectra were synthesized using reference spectra collected experimentally. For the first time, the accuracy and differences between the two approaches are reported. It is demonstrated that no meaningful conclusions can be drawn using single symmetric peaks to analyze complex Fe 2p3/2 spectra, implying that a large portion of the literature is flawed. The envelope fit approach, however, is shown to provide useful information regarding oxide ratios in mixed iron oxide materials, though limitations do exist. A methodology for evaluating the quality of XPS analysis of Fe 2p3/2 spectra is proposed for benchmarking new submissions so that reviewers, authors, and editors can assess these submissions.

Open Access Status

This publication may be available as open access

Volume

42

Issue

5

Article Number

053205

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Link to publisher version (DOI)

http://dx.doi.org/10.1116/6.0003804