Energy beam-based direct and assisted polishing techniques for diamond: A review
Publication Name
International Journal of Extreme Manufacturing
Abstract
Highlights The existing hurdles and various techniques for polishing diamond are summarized. Laser, ion beam, plasma-assisted, and laser-assisted polishing methods are reviewed. Material removal mechanism and influencing factors of various techniques are stated. Future directions of energy beam polishing techniques for diamond are discussed. Plasma-assisted polishing is suitable to get high-quality large diamond substrates.
Open Access Status
This publication may be available as open access
Volume
6
Issue
1
Article Number
012004
Funding Number
51835004
Funding Sponsor
National Natural Science Foundation of China