Accuracy limitations introduced by digital projection sources in profilometric optical metrology systems

Authors

Matthew J. BakerFollow
Joe F. Chicharo, University of WollongongFollow
Jiangtao Xi, University of WollongongFollow
Enbang Li, University of WollongongFollow

RIS ID

11867

Publication Details

This article was originally published as: Baker, MJ, Chicharo, JF, Xi, J & Li, E, Accuracy limitations introduced by digital projection sources in profilometric optical metrology systems, 2004 Conference on Optoelectronic and Microelectronic Materials and Devices, December 2004, 261-264. Copyright IEEE 2004.

Abstract

The accuracy of profilometric optical metrology systems utilising Digital Fringe Projection (DFP) is analysed. An analytical model to describe theoretical accuracy limitation is derived and given as a function of object distance from the projector, projector resolution, projection angle and also object gradient. Associated limitations of the model are also discussed and analysed. The validity of the new model is demonstrated through practical experimentation.