Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation
RIS ID
31911
Abstract
This paper presents the design methodology and dynamic modelling of a piezo-driven flexure-based Scott–Russell mechanism for nano-manipulations. Based on finite element analysis, the Scott–Russell mechanism is monolithically constructed to provide high positioning accuracy and long-term repeatability. With consideration for the effect of the driving circuit, the dynamic model of the flexure-based Scott–Russell mechanism is established. The influence of the time constant RC on the dynamic response is investigated. The transient responses of the flexure-based Scott–Russell mechanism to three typical signals are derived based on the Laplace transform method. It is noted that the cycloidal command signal can generate vibration-free motion, and thus improve the dynamic performance of the flexure-based mechanism. Experimental tests have been carried out to verify the developed Scott–Russell mechanism and the established models.
Publication Details
Tian, Y., Shirinzadeh, B., Zhang, D. and Alici, G. (2009). Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation. Mechanical Systems and Signal Processing, 23 (3), 957-978.