Development and fabrication of Cylindrical Silicon-on-Insulator Microdosimeter Arrays

Authors

Nai Shyan Lai, University of New South Wales
Wee Han Lim, University of New South Wales
Amy L. Ziebell, University of WollongongFollow
Mark I. Reinhard, Australian Nuclear Science and Technology Organisation
Anatoly B. Rosenfeld, University of WollongongFollow
Andrew S. Dzurak, University of New South Wales

RIS ID

27748

Publication Details

Lai, N., Lim, W., Ziebell, A., Reinhard, M. I., Rosenfeld, A. and Dzurak, A. S. (2009). Development and fabrication of Cylindrical Silicon-on-Insulator Microdosimeter Arrays. IEEE Transactions on Nuclear Science, 56 (3), 1637-1641.

Abstract

Recent developments in the fabrication and simulation of prototype silicon-on-insulator (SOI) microdosimeter arrays are presented. A new planar array design has been proposed which has a number of advantages over the previous elongated parallelepiped and cylindrical mesa array designs. This novel planar array design, which incorporates a guard ring, is based upon 2500 planar cylindrically shaped p-i-n detectors and was fabricated via dopant diffusion and ion implantation. The dopant-diffused arrays were successfully fabricated and tested using 2 mum and 10-mum- thick SOI substrates. Technology computer-aided design modeling of the ion-implanted structure is presented which includes the electrostatic potential profile, showing possible avalanche signal multiplication around the n+ core of the microdosimeter. The alpha particle charge transient response was simulated to determine the charge collection in the sensitive region.