6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3

Authors

Fapeng Yu, The Pennsylvania State University, Shandong University,
Shujun Zhang, The Pennsylvania State UniversityFollow
Xian Zhao, Shandong University
Duorong Yuan, Shandong University
Qing Ming Wang, University of Pittsburgh
Thomas R. Shrout, The Pennsylvania State University

RIS ID

107547

Publication Details

Yu, F., Zhang, S., Zhao, X., Yuan, D., Wang, Q. & Shrout, T. R. (2011). 6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3. Physica Status Solidi - Rapid Research Letters, 5 (2), 47-49.

Abstract

Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range. 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.