Individually controlled conducting polymer tri-layer microactuators

Authors

Edwin Jager, University of WollongongFollow
Nirul Masurkar, Linkoping University
Nnamdi F. Nworah, Linkoping University
Babita Gaihre, University of WollongongFollow
Gursel Alici, University of WollongongFollow
Geoffrey M. Spinks, University of WollongongFollow

RIS ID

87220

Publication Details

Jager, E. W. H., Masurkar, N., Nworah, N. F., Gaihre, B., Alici, G. & Spinks, G. M. (2013). Individually controlled conducting polymer tri-layer microactuators. Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 542-545). Spain: The Institute of Electrical and Electronics Engineers Inc.

Abstract

We are currently developing a range of microdevices based on polypyrrole (PPy) tri-layer microactuators that function in air. Here, we present recently developed microfabrication and patterning methods using photolithography for both thick, membrane and thin film poly(vinylidene difluoride) (PVDF) based PPy tri-layer actuators. We fabricated monolithically integrated, articulated actuator devices, i.e. comprising individually controllable actuators. We also introduce an interface for such PPy actuators based on a flexible printed circuit board, comprising the electrical contacts, into which the actuator device was inserted. Compartive evaluations showed that the microfabricated tri-layer actuators functioned as good as the normally fabricated actuators. The new interface seemed to actually improve the actuator performance.