Title

Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation

RIS ID

31911

Publication Details

Tian, Y., Shirinzadeh, B., Zhang, D. and Alici, G. (2009). Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation. Mechanical Systems and Signal Processing, 23 (3), 957-978.

Abstract

This paper presents the design methodology and dynamic modelling of a piezo-driven flexure-based Scott–Russell mechanism for nano-manipulations. Based on finite element analysis, the Scott–Russell mechanism is monolithically constructed to provide high positioning accuracy and long-term repeatability. With consideration for the effect of the driving circuit, the dynamic model of the flexure-based Scott–Russell mechanism is established. The influence of the time constant RC on the dynamic response is investigated. The transient responses of the flexure-based Scott–Russell mechanism to three typical signals are derived based on the Laplace transform method. It is noted that the cycloidal command signal can generate vibration-free motion, and thus improve the dynamic performance of the flexure-based mechanism. Experimental tests have been carried out to verify the developed Scott–Russell mechanism and the established models.

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Link to publisher version (DOI)

http://dx.doi.org/10.1016/j.ymssp.2008.06.007