Fabrication and characterization of electro-optic polymer/silicon hybrid MZI for interrogating small signals from an ECG
A Mach–Zehnder interferometer (MZI) composed of electro-optical polymer/silicon hybrid slot waveguides is reported. The device is designed to be asymmetrical so that the modulator is in a linear workspace when no electric field is applied to the initial operating state. We rely on the fast and strong nonlinearities of CLD-1/PMMA that infiltrates silicon rather than on the slower free-carrier effect in silicon. The modulated arm waveguides are designed in the shape of silicon/polymer hybrid slot waveguides to increase the interaction of the polymer material with the light field. The results show that the loss of the proposed MZI is 3.51 dB with a core size of 420μm × 160μm, and the half-wave voltage of the MZI is 2.1 V at 1550 nm, which provides the possibility of application in measuring small signals from an electrocardiogram with the optical principle.
Open Access Status
This publication is not available as open access
National Natural Science Foundation of China