The dosimetry of X-ray microbeams using MOSFETs results in an asymmetrical beam profile due to a lack of lateral charged particle equilibrium. Monte Carlo simulations were carried out using PENELOPE and GEANT4 codes to study this effect and a MOSFET on a micropositioner was scanned in the microbeam. Based on the simulations a new method of microbeam dosimetry is proposed. The proposed edge-on face-to-face (EOFF) MOSFET detector, a die arrangement proposed here for the first time, should alleviate the asymmetry. Further improvement is possible by thinning the silicon body of the MOSFET.