Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam

Authors

C C. Lee, University of Sydney, NSW, Australia
Gursel Alici, University of WollongongFollow
Geoffrey M. Spinks, University of WollongongFollow
G Proust, Uni of Sydney
Julie M. Cairney, University of Sydney, NSW, Australi

RIS ID

44498

Publication Details

Lee, C. C., Alici, G., Spinks, G. M., Proust, G. Cairney, J. M. (2011). Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam. Sensors and Actuators A: Physical, 172 (2), 462-470.

Abstract

Polymer¿metal microcantilever actuators have been fabricated using an innovative approach based onfocused ion beam micromachining technology. The fabrication involves depositing a thin metal filmonto the surface of the polymer and machining using the ion beam. The microcantilever created is thenextracted and transferred to a desirable support using a micromanipulator. This approach demonstratesthe potential for maskless and resistless prototyping of cantilevers that can be evaluated for use asMEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene¿platinum bimorphmicroactuator with respect to temperature change is demonstrated via visual monitoring in a scanningelectron microscope with a heating stage. The performance of the bimorph cantilever microactuators isverified using both analytical and finite element modeling.