Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam
Polymer¿metal microcantilever actuators have been fabricated using an innovative approach based onfocused ion beam micromachining technology. The fabrication involves depositing a thin metal filmonto the surface of the polymer and machining using the ion beam. The microcantilever created is thenextracted and transferred to a desirable support using a micromanipulator. This approach demonstratesthe potential for maskless and resistless prototyping of cantilevers that can be evaluated for use asMEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene¿platinum bimorphmicroactuator with respect to temperature change is demonstrated via visual monitoring in a scanningelectron microscope with a heating stage. The performance of the bimorph cantilever microactuators isverified using both analytical and finite element modeling.