RIS ID
135798
Abstract
This work proposes to measure the topography of microstructure surfaces using a self-mixing interference (SMI) configuration. The theoretical measurement model is built using beam-expanded plane wave method and considering SMI effect. The interference patterns for different objects are obtained based on the presented model. In addition, an algorithm for reconstructing the three-dimensional surface is implemented and applied onto an object with spherical surface. The presented work shows the potential application for topography measurement using a compact SMI configuration.
Publication Details
X. Sun, H. Wang, B. Liu & Y. Yu, "Measurement of microsurface topography using a self-mixing optical configuration," Optical Engineering, vol. 57, (5) pp. 051503-1-051503-6, 2018.