RIS ID
130711
Abstract
We used a system that exploits the Mach-Zehnder interferometer structure and Young's double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision. Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 x 10cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%.
Publication Details
Li, X., Duan, X., Li, G., Cao, T., Xie, R., Hong, Y., Tang, C., Li, E., Zhang, C. & Li, H. (2018). Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection. Optical Engineering, 57 (9), 094105-1-094105-9.