Thin Silicon Microdosimeter utilizing 3D MEMS Fabrication Technology: Charge Collection Study and its application in mixed radiation fields
journal contribution
posted on 2024-11-15, 08:53 authored by Thuy Linh TranThuy Linh Tran, Lachlan Chartier, Dale ProkopovichDale Prokopovich, David BolstDavid Bolst, Marco Povoli, Anand Summanwar, Angela Kok, Alex Pogossov, Marco PetaseccaMarco Petasecca, Susanna GuatelliSusanna Guatelli, Mark Reinhard, Michael LerchMichael Lerch, Mitchell NancarrowMitchell Nancarrow, Naruhiro Matsufuji, Michael Jackson, Anatoly RozenfeldAnatoly RozenfeldNew 10-μm-thick silicon microdosimeters utilizing 3-D technology have been developed and investigated in this paper. The TCAD simulations were carried out to understand the electrical properties of the microdosimeters' design. A charge collection study of the devices was performed using 5.5-MeV He2+ ions which were raster scanned over the surface of the detectors and the charge collection median energy maps were obtained and the detection yield was also evaluated. The devices were tested in a 290 MeV/u carbon ion beam at the Heavy Ion Medical Accelerator in Chiba (HIMAC) in Japan. Based on the microdosimetric measurements, the quality factor and dose equivalent out of field were obtained in a mixed radiation field mimicking the radiation environment for spacecraft in deep space.