Self-Mixing Interferometry Cooperating with Frequency Division Multiplexing for Multiple-Dimensional Displacement Measurement

In this study, a multiple-dimensional displacement measurement technology is demonstrated by using self-mixing interferometry (SMI) cooperating with a frequency division multiplexing (FDM) technique. The proposed SMI configuration with a single laser generates three modulated light beams with different carrier frequencies. Each beam is incident on a planar grating with its own auto-collimation diffraction angle. The diffracted beams return to the laser cavity and then self-mixing interference occurs. An algorithm based on FDM is developed for multiple-dimensional displacement reconstruction from a single SMI signal. Experiments are conducted to verify the proposed approach. This paper shows an attractive sensing system for multiple-dimensional displacement featuring compact configuration, high resolution and better immunity to environmental disturbances.