Microring structure for flexible polymer waveguide-based optical pressure sensing
journal contribution
posted on 2024-11-17, 13:12authored byHongqiang Li, Zhilin Lin, Lu Cao, Feng Ren, Lizhen Zhang, Yingjie Wang, Ruina Zhao, Zhenya Song, Yang Liu, Youshan Hu, Changyu Li, Shanshan Zhang, Enbang Li, Joan Daniel Prades
Flexible pressure sensors provide a promising platform for artificial smart skins, and photonic devices provide a new technique to fabricate pressure sensors. Here, we present a flexible waveguide-based optical pressure sensor based on a microring structure. The waveguide-based optical pressure sensor is based on a five-cascade microring array structure with a size of 1500 µm × 500 µm and uses the change in output power to linearly characterize the change in pressure acting on the device. The results show that the device has a sensing range of 0–60 kPa with a sensitivity of 23.14 µW/kPa, as well as the ability to detect pulse signals, swallowing, hand gestures, etc. The waveguide-based pressure sensors offer the advantages of good output linearity, high integration density and easy-to-build arrays.
Funding
National Natural Science Foundation of China (61177078)