Large piezoelectric effect in lead-free Ba(Zr0.2Ti 0.8)O3-(Ba0.7Ca0.3)TiO3 films prepared by screen printing with solution infiltration process

High-quality piezoelectric Ba(Zr0.2Ti0.8)O3–50(Ba0.7Ca0.3)TiO3 films with very dense and homogenous microstructure were fabricated using chemical solution infiltration into porous screen-printed films. The films with a thickness of 10 μm exhibited high relative permittivity of 2380, low dielectric loss of 1.6% (at 10 kHz), large remanent polarization of 22 μC/cm2, and large longitudinal piezoelectric constant d33 of 220 pC/N, which is even better than the case of lead-based piezoelectric films. The excellent electrical propertiesmake the films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems.