LET dependence of the charge collection efficiency of silicon microdosimeters

A heavy ion microprobe was used to conduct ion beam induced charge (IBIC) collection imaging of silicon microdosimeters. The GEANT4 Monte Carlo toolkit was used to simulate these measurements to calculate ion energy loss in the device overlayer and energy deposition in the device sensitive volume. A comparison between experimental and theoretical results facilitated the calculation of charge collection efficiency profiles for several ions.