High-order face-shear modes of relaxor-PbTiO3 crystals for piezoelectric motor applications

The face-shear vibration modes of [011] poled Zt ± 45° cut relaxor-PT crystals and their applications for linear piezoelectric motors were investigated. Unlike piezoelectric ceramics, the rotated crystal was found to exhibit asymmetric face-shear deformations, and its two high-order face-shear modes degraded into two non-isomorphic modes. As an application example, a standing wave ultrasonic linear motor (10 × 10 × 2 mm3) operating in high-order face-shear vibration modes was developed. The motor exhibits a large driving force (1.5 N) under a low driving voltage (22 Vpp). These findings could provide guidance for design of crystal resonance devices.