Motion tracking control of piezo-driven flexure-based mechanism based on sliding mode strategy

This paper presents a motion tracking control methodology based on sliding mode strategy for a flexure-based micro/nano manipulator driven by a piezoelectric actuator. This control methodology is proposed for tracking of desired motion trajectories in the presence of uncertain system parameters, non-linearities including the hysteresis effect, and external disturbances in the control system. In this paper, a four-bar link is investigated and a lumped parameter dynamic model is established for the formulation of the proposed sliding mode motion control methodology. The convergence of the position tracking error to zero is assured by the approach in the presence of the aforementioned conditions. The stability of the closed-loop system is proven theoretically, and a precise tracking performance in following a desired motion trajectory is demonstrated in the experimental study. With the capability of motion tracking, the proposed control methodology can be employed in realising high performance flexure-based control applications.