Investigations into the electrochemical etching process of p-type silicon using ethanol-surfactant solutions

Authors

Sivakumar Balakrishnan, CSIRO, University of Wollongong
Yurii K. Gun'ko
Gerhard F. Swiegers, University of WollongongFollow
Tatiana S. Perova

RIS ID

143053

Publication Details

Balakrishnan, S., Gun'ko, Y. K., Swiegers, G. F. & Perova, T. S. (2017). Investigations into the electrochemical etching process of p-type silicon using ethanol-surfactant solutions. AIP Conference Proceedings, 1884 (1), 030007-1-030007-4.

Abstract

In this work, the electrochemical etching of p-type silicon was performed in aqueous ethanol-surfactant solutions and the dependence of morphology and luminescent properties of porous silicon with respect to the etching parameters and silicon resistivities have been studied. The obtained porous silicon structures have been studied using various characterisation techniques such as SEM (Scanning Electron Microscopy) and Photoluminescence (PL) spectroscopy.