Study on a flexoelectric microphone using barium strontium titanate
RIS ID
117885
Abstract
In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm x 768 μm x 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.
Publication Details
Kwon, S. R., Huang, W. B., Zhang, S. J., Yuan, F. G. & Jiang, X. N. (2016). Study on a flexoelectric microphone using barium strontium titanate. Journal Of Micromechanics And Microengineering, 26 (4), 045001-1-045001-9.