Title

Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam

RIS ID

44498

Publication Details

Lee, C. C., Alici, G., Spinks, G. M., Proust, G. Cairney, J. M. (2011). Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam. Sensors and Actuators A: Physical, 172 (2), 462-470.

Abstract

Polymer¿metal microcantilever actuators have been fabricated using an innovative approach based onfocused ion beam micromachining technology. The fabrication involves depositing a thin metal filmonto the surface of the polymer and machining using the ion beam. The microcantilever created is thenextracted and transferred to a desirable support using a micromanipulator. This approach demonstratesthe potential for maskless and resistless prototyping of cantilevers that can be evaluated for use asMEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene¿platinum bimorphmicroactuator with respect to temperature change is demonstrated via visual monitoring in a scanningelectron microscope with a heating stage. The performance of the bimorph cantilever microactuators isverified using both analytical and finite element modeling.

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Link to publisher version (DOI)

http://dx.doi.org/10.1016/j.sna.2011.08.022