The high spatial and temporal resolution 2D monolithic silicon detector arrays M512 and DUO for quality assurance (QA) in real time motion adaptive radiotherapy (ART) have been developed. The DUO array possesses a spatial resolution of 0.2 mm and has demonstrated agreement within 5% with EBT3 film measurements of 6MV linac beam profiles for field sizes 1 × 1 cm2 and SRS cone diameter 0.5 cm. Dynamic characterisation of the M512 for QA in real time ART evaluated the performance of M512 for small fields while the detector experiences periodic motion. It was demonstrated with M512 that MLC tracking with Calypso electromagnetic array compensates for the periodic motion and improves the agreement between static and dynamic beam profiles for field size 1 × 1 cm2 from within 75% in the penumbra to within 11% agreement. The dynamic profile is returned to a similar distribution as the static case.