Large piezoelectric effect in low-temperature-sintered lead-free (ba0.85ca0.15)(zr0.1ti0.9)o-3 thick films
High-quality piezoelectric (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films with dense and homogenous microstructures were fabricated at a low sintering temperature (900 degrees C) using a CuBi2O4 sintering aid. The 10 mu m thick film exhibited a high longitudinal piezoelectric constant d(33,eff) of 210 pC/N with estimated unconstrained d(33) value of 560 pC/N very close to that in the corresponding bulks. Such excellent piezoelectric effect in the low-temperature sintered (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films is comparable to the case of lead-based PZT thick films, and may be a promising application in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).
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