Study on a flexoelectric microphone using barium strontium titanate



Publication Details

Kwon, S. R., Huang, W. B., Zhang, S. J., Yuan, F. G. & Jiang, X. N. (2016). Study on a flexoelectric microphone using barium strontium titanate. Journal Of Micromechanics And Microengineering, 26 (4), 045001-1-045001-9.


In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  x  768 μm  x  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

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