Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors
RIS ID
107470
Abstract
The dielectric and electromechanical properties of fully ordered Ca 3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60∼700 C. The highest electromechanical coupling factor, k26 (18.9%) and piezoelectric coefficient, d26 (-11.5 pC/N) were obtained for (YXl)-25° cuts. The temperature dependent behavior of resonance frequency (fr) was investigated in single-rotated thickness shear mode (TSM) (YXl)θ cuts (θ-35°∼10°). The turnover temperatures of resonance frequency were found to increase from 20°C to 330°C, as the rotation angle varied from -22.5° to -35°. Bulk acoustic wave (BAW) resonators based on Y(-30) monolithic disks with a fundamental frequency ∼2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20°C and 700°C, respectively. The high coupling k26, high mechanical Q, and high electrical resistivity (16 Mcm) at 700°C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications. 2011 American Institute of Physics.
Publication Details
Yu, F., Zhang, S., Zhao, X., Yuan, D., Qin, L., Wang, Q. & Shrout, T. R. (2011). Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors. Journal of Applied Physics, 109 (11), 114103-1-114103-6.