Enhanced piezoelectric properties of solution-modified Ba(Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3 thick films

Authors

Zuyong Feng, University of Wollongong, Guangdong University of TechnologyFollow
Jie Luo, Guangdong University of Technology
Wei Zhang, Guangdong University of Technology
Xingui Tang, Guangdong University
Zhenxiang Cheng, University of WollongongFollow
Dongqi Shi, University of WollongongFollow
S X. Dou, University of WollongongFollow

RIS ID

98634

Publication Details

Feng, Z., Luo, J., Zhang, W., Tang, X., Cheng, Z., Shi, D. & Dou, S. (2015). Enhanced piezoelectric properties of solution-modified Ba(Zr_0.2Ti_0.8)O₃-(Ba_0.7Ca_0.3)TiO₃ thick films. Journal of Alloys and Compounds, 632 651-654.

Abstract

High-quality piezoelectric 0.5Ba(Zr_0.2Ti_0.8)O₃-0.5(Ba_0.7Ca_0.3)TiO₃ thick films with the thickness of 6 μm were prepared by screen printing with solution infiltration process. The modified films near the morphotropic phase boundary (MPB) showed very dense and homogenous microstructure with large grain size, and presented markedly enhanced piezoelectric properties with large remanent polarization of 22 μC/cm² and a longitudinal piezoelectric constant d₃₃ of 220 pC/N, which were over two times higher than those of the screen printed films without the solution infiltration process. The excellent piezoelectric properties comparable to the case of lead-based thick films, make the modified films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).